Acknowledgments
This work was supported by Major Program of National Natural Science Foundation of China (62034001), Research on Key technologies of high efficiency ultra-thin heterojunction solar cell and module (HNKJ22-H154), the project of high-efficiency heterojunction solar cell technology and equipment industrialization (TC220A04A-159), the Fundamental Research Funds for the Central Universities (E1E41804X2), the industrial independent innovation plan of “Xia Ke” Light (JY0604-A021015-210003-PB).